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MEMS Microbridge Vibration Monitoring Using Spin-Valve Sensors.
- Source :
-
IEEE Transactions on Magnetics . Sep2002 Part 1, Vol. 38 Issue 5, p3371. 3p. 1 Diagram, 3 Graphs. - Publication Year :
- 2002
-
Abstract
- Presents information on a study which measured on chip the vibration of microelectromechanical systems microbridges excited by direct current and alternating current voltages using spin-valve sensors. Methods; Results; Discussion.
- Subjects :
- *VIBRATION (Mechanics)
*MICROELECTROMECHANICAL systems
*DETECTORS
Subjects
Details
- Language :
- English
- ISSN :
- 00189464
- Volume :
- 38
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Magnetics
- Publication Type :
- Academic Journal
- Accession number :
- 8607447
- Full Text :
- https://doi.org/10.1109/TMAG.2002.802288