Cite
Polycrystalline silicon thin-film transistor with self-aligned SiGe raised source/drain.
MLA
Peng, Du Zen, et al. “Polycrystalline Silicon Thin-Film Transistor with Self-Aligned SiGe Raised Source/Drain.” Applied Physics Letters, vol. 81, no. 25, Dec. 2002, p. 4763. EBSCOhost, https://doi.org/10.1063/1.1528727.
APA
Peng, D. Z., Chang, T.-C., Shih, P.-S., Zan, H.-W., Huang, T.-Y., Chang, C.-Y., & Liu, P.-T. (2002). Polycrystalline silicon thin-film transistor with self-aligned SiGe raised source/drain. Applied Physics Letters, 81(25), 4763. https://doi.org/10.1063/1.1528727
Chicago
Peng, Du Zen, Ting-Chang Chang, Po-Sheng Shih, Hsiao-Wen Zan, Tiao-Yuan Huang, Chun-Yen Chang, and Po-Tsun Liu. 2002. “Polycrystalline Silicon Thin-Film Transistor with Self-Aligned SiGe Raised Source/Drain.” Applied Physics Letters 81 (25): 4763. doi:10.1063/1.1528727.