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Observation of Positive Self-Bias in Radio Frequency Atmospheric Pressure Microplasmas.

Authors :
Chen, Qiang
Li, Junshuai
Source :
IEEE Transactions on Plasma Science. Apr2013 Part 3, Vol. 41 Issue 4, p826-828. 3p.
Publication Year :
2013

Abstract

Negative self-bias is well known at the powered small-sized electrode in low-pressure capacitive-coupled discharge plasmas. In this paper, however, the self-bias at the powered electrode observed in an RF atmospheric-pressure microplasma demonstrates either a positive or negative sign depending on the supplied power and interelectrode gap. [ABSTRACT FROM PUBLISHER]

Details

Language :
English
ISSN :
00933813
Volume :
41
Issue :
4
Database :
Academic Search Index
Journal :
IEEE Transactions on Plasma Science
Publication Type :
Academic Journal
Accession number :
86975077
Full Text :
https://doi.org/10.1109/TPS.2013.2248169