Back to Search
Start Over
Observation of Positive Self-Bias in Radio Frequency Atmospheric Pressure Microplasmas.
- Source :
-
IEEE Transactions on Plasma Science . Apr2013 Part 3, Vol. 41 Issue 4, p826-828. 3p. - Publication Year :
- 2013
-
Abstract
- Negative self-bias is well known at the powered small-sized electrode in low-pressure capacitive-coupled discharge plasmas. In this paper, however, the self-bias at the powered electrode observed in an RF atmospheric-pressure microplasma demonstrates either a positive or negative sign depending on the supplied power and interelectrode gap. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISSN :
- 00933813
- Volume :
- 41
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Plasma Science
- Publication Type :
- Academic Journal
- Accession number :
- 86975077
- Full Text :
- https://doi.org/10.1109/TPS.2013.2248169