Cite
Contamination control in gas delivery systems for MOCVD
MLA
Watanabe, Tadaharu, et al. “Contamination Control in Gas Delivery Systems for MOCVD.” Journal of Crystal Growth, vol. 248, no. 1–4, Feb. 2003, p. 67. EBSCOhost, https://doi.org/10.1016/S0022-0248(02)01889-4.
APA
Watanabe, T., Funke, H. H., Torres, R., Raynor, M. W., Vininski, J., & Houlding, V. H. (2003). Contamination control in gas delivery systems for MOCVD. Journal of Crystal Growth, 248(1–4), 67. https://doi.org/10.1016/S0022-0248(02)01889-4
Chicago
Watanabe, Tadaharu, Hans H. Funke, Robert Torres, Mark W. Raynor, Joseph Vininski, and Virginia H. Houlding. 2003. “Contamination Control in Gas Delivery Systems for MOCVD.” Journal of Crystal Growth 248 (1–4): 67. doi:10.1016/S0022-0248(02)01889-4.