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Assisted cubic to hexagonal phase transition in GeSbTe thin films on silicon nitride.
- Source :
-
Thin Solid Films . Jun2013, Vol. 536, p216-219. 4p. - Publication Year :
- 2013
-
Abstract
- The amorphous to face-centered cubic (fcc) and fcc to hexagonal close-packed (hcp) crystallization temperatures of GeSbTe thin films on underlying silicon nitride and silicon dioxide films were studied through slow (1K/min) resistance versus temperature measurements. The amorphous to fcc phase transition is observed at ~170°C for both cases but the fcc to hcp phase transition temperature for GeSbTe films on silicon nitride is observed to be ~80°C lower than for GeSbTe films on silicon dioxide, possibly due to the hexagonal symmetry of silicon nitride. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 536
- Database :
- Academic Search Index
- Journal :
- Thin Solid Films
- Publication Type :
- Academic Journal
- Accession number :
- 89257931
- Full Text :
- https://doi.org/10.1016/j.tsf.2013.03.087