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Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules.

Authors :
Chang, Tien-Li
Chen, Chien-Yu
Wang, Chien-Ping
Source :
Microelectronic Engineering. Oct2013, Vol. 110, p381-385. 5p.
Publication Year :
2013

Abstract

Abstract: This study presents the micromachining of CuIn x Ga(1− x )Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
01679317
Volume :
110
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
89339370
Full Text :
https://doi.org/10.1016/j.mee.2013.02.072