Phase retrieval technology for off-axis ellipsoid surface test with a high dynamic range algorithm.

Abstract: Phase retrieval technology for off-axis ellipsoid surface measurement with a high dynamic range algorithm is proposed in this paper. A high dynamic range algorithm (HDRA) for phase retrieval is proposed. We proved the validity of it in simulation. Then the HDRA is used to measure an off-axis ellipsoid. The measurement setup was established and the HDRA was applied to retrieve the surface shape of the off-axis ellipsoid. The experimental results show that the phase retrieval results are good agreement with that obtained by interferometer, which confirms the validity of this method. [Copyright &y& Elsevier]