Cite
Ultra low-K shrinkage behavior when under electron beam in a scanning electron microscope.
MLA
Lorut, F., et al. “Ultra Low-K Shrinkage Behavior When under Electron Beam in a Scanning Electron Microscope.” Journal of Applied Physics, vol. 114, no. 8, Aug. 2013, p. 084508. EBSCOhost, https://doi.org/10.1063/1.4819890.
APA
Lorut, F., Roggero, A., & Imbert, G. (2013). Ultra low-K shrinkage behavior when under electron beam in a scanning electron microscope. Journal of Applied Physics, 114(8), 084508. https://doi.org/10.1063/1.4819890
Chicago
Lorut, F., A. Roggero, and G. Imbert. 2013. “Ultra Low-K Shrinkage Behavior When under Electron Beam in a Scanning Electron Microscope.” Journal of Applied Physics 114 (8): 084508. doi:10.1063/1.4819890.