Martensitic phase transformation of TiNi thin films fabricated by co-sputtering deposition.

Highlights: [•] We fabricated TiNi thin films using advanced multi-target sputtering system. [•] We examine martensitic transformation of TiNi thin films by heat-treatment. [•] Composition effect on martensitic transformation of TiNi films was also examined. [•] Ideal heat-treatment condition of TiNi thin films for application was reported. [ABSTRACT FROM AUTHOR]