Abrasive and additive interactions in high selectivity STI CMP slurries.

Highlights: [•] Silicon dioxide to silicon nitride removal rate selectivity evaluated. [•] Ceria purity and crystal structure influence selectivity. [•] l-glutamic acid yields high selectivity with all ceria and is robust. [•] l-proline yields high selectivity only with one ceria and is less robust. [ABSTRACT FROM AUTHOR]