Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio.

Authors :: Cui, Jiwen
Feng, Kunpeng
Zhu, Shengqi
Zhang, Yue
Tan, Jiubin
Source :: Measurement (02632241). Jan2014, Vol. 47, p707-714. 8p.
Publication Year :: 2014
Abstract: Highlights: [•] SCP is applied to measure the dimension of micro-cavity with high aspect ratio. [•] Location method based on OJFMs is proposed to improve the performance of SCP. [•] Improved SCP is experimentally tested by measuring a blind micro-hole. [ABSTRACT FROM AUTHOR]

Subjects :: *OPTICAL fibers
*MOLECULAR probes
*ASPECT ratio (Images)
*PERFORMANCE evaluation
*PIXELS
*DIMENSIONAL analysis

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