An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications.

Highlights: [•] The design, fabrication, and characterization of an electromagnetically actuated micromirror with precise angle control, suitable for harsh environment optical switching applications, are reported. [•] Processes have been developed to accurately produce the frontside/backside structure overlap for angle fixing. [•] The device is packaged with a textured silicon encapsulation to promote high contrast and better vibration resistance. [•] The nonlinear magnetic response and dynamic behavior have been incorporated into the analytical model. [•] A pulsed voltage driving circuit is used to increase the electromagnet response speed. [ABSTRACT FROM AUTHOR]