Removal characteristics of particulate matter with different return air system designs in a nonunidirectional cleanroom for integrated circuit (Ic) testing processes.

MLA

Hu, Shih-Cheng, et al. “Removal Characteristics of Particulate Matter with Different Return Air System Designs in a Nonunidirectional Cleanroom for Integrated Circuit (Ic) Testing Processes.” HVAC&R Research, vol. 20, no. 1, Jan. 2014, pp. 162–66. EBSCOhost, https://doi.org/10.1080/10789669.2013.840523.

APA

Hu, S.-C., Shiue, Y.-Y., Shiue, A., & Tsai, M.-H. (2014). Removal characteristics of particulate matter with different return air system designs in a nonunidirectional cleanroom for integrated circuit (Ic) testing processes. HVAC&R Research, 20(1), 162–166. https://doi.org/10.1080/10789669.2013.840523

Chicago

Hu, Shih-Cheng, Yu-Yun Shiue, Angus Shiue, and Ming-Heng Tsai. 2014. “Removal Characteristics of Particulate Matter with Different Return Air System Designs in a Nonunidirectional Cleanroom for Integrated Circuit (Ic) Testing Processes.” HVAC&R Research 20 (1): 162–66. doi:10.1080/10789669.2013.840523.