Cite
Effect of Cations on the Chemical Mechanical Polishing of SiO2 Film.
MLA
Han, Song, et al. “Effect of Cations on the Chemical Mechanical Polishing of SiO2 Film.” Chinese Physics Letters, vol. 30, no. 9, Sept. 2013, pp. 098103–06. EBSCOhost, https://doi.org/10.1088/0256-307X/30/9/098103.
APA
Han, S., Liang-Yong, W., Wei-Li, L., & Zhi-Tang, S. (2013). Effect of Cations on the Chemical Mechanical Polishing of SiO2 Film. Chinese Physics Letters, 30(9), 098103–098106. https://doi.org/10.1088/0256-307X/30/9/098103
Chicago
Han, Song, Wang Liang-Yong, Liu Wei-Li, and Song Zhi-Tang. 2013. “Effect of Cations on the Chemical Mechanical Polishing of SiO2 Film.” Chinese Physics Letters 30 (9): 098103–6. doi:10.1088/0256-307X/30/9/098103.