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Ordering of self-assembled 5-nm-diameter poly(dimethylsiloxane) nanodots with sub-10nm pitch using ultra-narrow electron-beam-drawn guide lines and three-dimensional control.
- Source :
-
Applied Physics Letters . 3/3/2014, Vol. 104 Issue 9, p1-4. 4p. 1 Color Photograph, 2 Diagrams, 3 Graphs. - Publication Year :
- 2014
-
Abstract
- We demonstrate the possibility of forming long-range ordered self-assembled arrays of 5-nmdiameter nanodots with pitch of 10×7.5 nm² using guide line templates and low molecular weight (MW) (4700-1200 g/mol) poly(styrene)-poly(dimethylsiloxane) (PS-PDMS) for application in ultrahigh density patterned magnetic recording media. We propose a three-dimensional control which involves control of the height of the guide lines, the thickness of the PS-PDMS films, and the gap between the guide lines in order to produce 5-nm-diameter, sub-10 nm pitched nanodots with long-range order along the guide lines. Adopting a 13-nm-thick PS-PDMS film and 14-nm-high resist guide lines, the 5-nm-diameter and 10×7.5 nm²-pitched self-assembled nanodots were ordered in 4-7 dot arrays with long-range order. The experimental results demonstrate that the method is suitable for the production of patterned media with magnetic recording densities of 8.6 Tbit/in². using low MW PS-PDMS and slim guide lines. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 104
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 94854390
- Full Text :
- https://doi.org/10.1063/1.4867981