H2S Sensing Properties of R.F. Sputtered NiO Thin Films.

Authors :: Bagwaiya, Toshi
Goyal, C. P.
Bhattacharya, Shovit
Ramgir, N. S.
Bhattacharya, D.
Koiry, S. P.
Aswal, D. K.
Gupta, S. K.
Source :: AIP Conference Proceedings. 2014, Vol. 1591, p938-940. 3p. 5 Graphs.
Publication Year :: 2014
Abstract: NiO thin films prepared by RF sputtering have been investigated for possible gas sensing application. The sensor films having thickness of around 30 nm were extremely smooth exhibiting a surface roughness of ~0.7 Å. These films exhibited a highly sensitive and selective response towards H2S at an operating temperature of 300°C. [ABSTRACT FROM AUTHOR]