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Strain Imaging of Nanoscale Semiconductor Heterostructures with X-Ray Bragg Projection Ptychography.
- Source :
-
Physical Review Letters . 4/25/2014, Vol. 112 Issue 16, p165502-1-165502-6. 6p. - Publication Year :
- 2014
-
Abstract
- We report the imaging of nanoscale distributions of lattice strain and rotation in complementary components of lithographically engineered epitaxial thin film semiconductor heterostructures using synchrotron x-ray Bragg projection ptychography (BPP). We introduce a new analysis method that enables lattice rotation and out-of-plane strain to be determined independently from a single BPP phase reconstruction, and we apply it to two laterally adjacent, multiaxially stressed materials in a prototype channel device. These results quantitatively agree with mechanical modeling and demonstrate the ability of BPP to map out-of-plane lattice dilatation, a parameter critical to the performance of electronic materials. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00319007
- Volume :
- 112
- Issue :
- 16
- Database :
- Academic Search Index
- Journal :
- Physical Review Letters
- Publication Type :
- Academic Journal
- Accession number :
- 96041407
- Full Text :
- https://doi.org/10.1103/PhysRevLett.112.165502