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Fabrication and characterization of a piezoelectric micromirror using for optical data tracking of high-density storage.
- Source :
-
Microsystem Technologies . Jul2014, Vol. 20 Issue 7, p1317-1322. 6p. - Publication Year :
- 2014
-
Abstract
- A micromirror actuated by three piezoelectric microcantilevers is presented for optical data tracking of high-density storage application. The microcantilevers are actuated by 2.5-μm-thick lead zirconate titanate (PZT) films which are deposited on the silicon-based substrate by a compatible sol-gel route. The X-ray diffraction result shows that the PZT film is perovskite structure and has a typical good ferroelectric loop. The quasi-static displacement of the mirror plate increases linearly with increasing the driving voltage and the tracking resolution on disk is as high as 8 nm/V. The micromirror also provides a high bandwidth of about 21 kHz, which is high enough to support the optical data tracking of future high-density storage. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09467076
- Volume :
- 20
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Microsystem Technologies
- Publication Type :
- Academic Journal
- Accession number :
- 96693783
- Full Text :
- https://doi.org/10.1007/s00542-013-1931-8