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Superconducting storage ring NIJI-III.
- Source :
-
Review of Scientific Instruments . Jan1992, Vol. 63 Issue 1, p753. 4p. - Publication Year :
- 1992
-
Abstract
- NIJI-III is a compact, superconducting storage ring dedicated for use in several commercial applications, especially x-ray lithography. Assembly of the ring has been completed and NIJI-III has been operating since August 1990. A beam current of above 450 mA was attained at an injection energy of 280 MeV. Currents of more than 200 mA can be accumulated at the final energy of 600 MeV. [ABSTRACT FROM AUTHOR]
- Subjects :
- *STORAGE rings
*X-ray lithography
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 63
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 9783171
- Full Text :
- https://doi.org/10.1063/1.1142652