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Measuring and predicting resolution in nanopositioning systems.
- Source :
-
Mechatronics . Sep2014, Vol. 24 Issue 6, p605-618. 14p. - Publication Year :
- 2014
-
Abstract
- The resolution is a critical performance metric of precision mechatronic systems such as nanopositioners and atomic force microscopes. However, there is not presently a strict definition for the measurement or reporting of this parameter. This article defines resolution as the smallest distance between two non-overlapping position commands. Methods are presented for simulating and predicting resolution in both the time and frequency domains. In order to simplify resolution measurement, a new technique is proposed which allows the resolution to be estimated from a measurement of the closed-loop actuator voltage. Simulation and experimental results demonstrate the proposed techniques. The paper concludes by comparing the resolution benefits of new control schemes over standard output feedback techniques. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09574158
- Volume :
- 24
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Mechatronics
- Publication Type :
- Academic Journal
- Accession number :
- 97845840
- Full Text :
- https://doi.org/10.1016/j.mechatronics.2013.10.003