Cite
Monitoring of hydrocarbon concentrations in dust-producing RF plasmas.
MLA
Hempel, F., et al. “Monitoring of Hydrocarbon Concentrations in Dust-Producing RF Plasmas.” Plasma Sources Science & Technology, vol. 21, no. 5, Oct. 2012, p. 1. EBSCOhost, https://doi.org/10.1088/0963-0252/21/5/055001.
APA
Hempel, F., Lopatik, D., Röpcke, J., Sikimic, B., Stefanovic, I., & Winter, J. (2012). Monitoring of hydrocarbon concentrations in dust-producing RF plasmas. Plasma Sources Science & Technology, 21(5), 1. https://doi.org/10.1088/0963-0252/21/5/055001
Chicago
Hempel, F., D. Lopatik, J. Röpcke, B. Sikimic, I. Stefanovic, and J. Winter. 2012. “Monitoring of Hydrocarbon Concentrations in Dust-Producing RF Plasmas.” Plasma Sources Science & Technology 21 (5): 1. doi:10.1088/0963-0252/21/5/055001.