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The characterization of capacitive micromachined ultrasonic transducers in air.
- Source :
-
Ultrasonics [Ultrasonics] 2002 May; Vol. 40 (1-8), pp. 477-83. - Publication Year :
- 2002
-
Abstract
- Surface micromachined, capacitive ultrasonic transducers have been fabricated using a low thermal budget, CMOS-compatible process. They exhibit interesting properties for transduction in air at frequencies in excess of 1 MHz, when driven from a standard ultrasonic voltage source. Experiments are described using 1 mm square devices in air, operating in both pitch-catch and pulse-echo modes. The dependence on d.c. bias voltage is examined, together with calibration measurements using 1/8 in. microphones. The radiated beam profile, and the farfield directivity pattern, have been measured for both broad bandwidth and one-burst excitation, using a scanned miniature receiver. A 16 element square array is also presented, which has been used to measure the beam cross-sections from a focussed source.
Details
- Language :
- English
- ISSN :
- 0041-624X
- Volume :
- 40
- Issue :
- 1-8
- Database :
- MEDLINE
- Journal :
- Ultrasonics
- Publication Type :
- Academic Journal
- Accession number :
- 12159986
- Full Text :
- https://doi.org/10.1016/s0041-624x(02)00162-2