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Vibrational activation in direct and precursor-mediated chemisorption of SiH(4) on Si(100).
- Source :
-
The Journal of chemical physics [J Chem Phys] 2008 Aug 28; Vol. 129 (8), pp. 081103. - Publication Year :
- 2008
-
Abstract
- The quantum state-resolved reactivity S(0) of SiH(4) on Si(100)-2x1 has been measured for the first time for two vibrationally excited Si-H stretch local mode states (mid R:2000 and mid R:1100) as well the ground state S(0) as a function of translational energy E(n) and surface temperature T(s). We observe evidence for both direct and precursor-mediated chemisorption pathways. As expected, increasing E(n) (or T(s)) decreases S(0) for the precursor-mediated reaction and increases S(0) for the direct chemisorption. However, vibrational excitation of the incident SiH(4) increases S(0) for both the direct and the precursor-mediated pathway with a higher S(0) for the mid R:2000 state than for the mid R:1100 state, indicating a nonstatistical reaction mechanism.
Details
- Language :
- English
- ISSN :
- 1089-7690
- Volume :
- 129
- Issue :
- 8
- Database :
- MEDLINE
- Journal :
- The Journal of chemical physics
- Publication Type :
- Academic Journal
- Accession number :
- 19044811
- Full Text :
- https://doi.org/10.1063/1.2976563