Neon Ion Beam Lithography (NIBL).

MLA

Winston, Donald, et al. “Neon Ion Beam Lithography (NIBL).” Nano Letters, vol. 11, no. 10, Oct. 2011, pp. 4343–47. EBSCOhost, https://doi.org/10.1021/nl202447n.

APA

Winston, D., Manfrinato, V. R., Nicaise, S. M., Cheong, L. L., Duan, H., Ferranti, D., Marshman, J., McVey, S., Stern, L., Notte, J., & Berggren, K. K. (2011). Neon Ion Beam Lithography (NIBL). Nano Letters, 11(10), 4343–4347. https://doi.org/10.1021/nl202447n

Chicago

Winston, Donald, Vitor R Manfrinato, Samuel M Nicaise, Lin Lee Cheong, Huigao Duan, David Ferranti, Jeff Marshman, et al. 2011. “Neon Ion Beam Lithography (NIBL).” Nano Letters 11 (10): 4343–47. doi:10.1021/nl202447n.