Back to Search Start Over

Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects.

Authors :
Li G
Yao J
Thacker H
Mekis A
Zheng X
Shubin I
Luo Y
Lee JH
Raj K
Cunningham JE
Krishnamoorthy AV
Source :
Optics express [Opt Express] 2012 May 21; Vol. 20 (11), pp. 12035-9.
Publication Year :
2012

Abstract

We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.

Details

Language :
English
ISSN :
1094-4087
Volume :
20
Issue :
11
Database :
MEDLINE
Journal :
Optics express
Publication Type :
Academic Journal
Accession number :
22714189
Full Text :
https://doi.org/10.1364/OE.20.012035