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Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects.
- Source :
-
Optics express [Opt Express] 2012 May 21; Vol. 20 (11), pp. 12035-9. - Publication Year :
- 2012
-
Abstract
- We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.
Details
- Language :
- English
- ISSN :
- 1094-4087
- Volume :
- 20
- Issue :
- 11
- Database :
- MEDLINE
- Journal :
- Optics express
- Publication Type :
- Academic Journal
- Accession number :
- 22714189
- Full Text :
- https://doi.org/10.1364/OE.20.012035