High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field.

MLA

Wen, X., et al. “High Throughput Optical Lithography by Scanning a Massive Array of Bowtie Aperture Antennas at Near-Field.” Scientific Reports, vol. 5, Nov. 2015, p. 16192. EBSCOhost, https://doi.org/10.1038/srep16192.

APA

Wen, X., Datta, A., Traverso, L. M., Pan, L., Xu, X., & Moon, E. E. (2015). High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field. Scientific Reports, 5, 16192. https://doi.org/10.1038/srep16192

Chicago

Wen, X, A Datta, L M Traverso, L Pan, X Xu, and E E Moon. 2015. “High Throughput Optical Lithography by Scanning a Massive Array of Bowtie Aperture Antennas at Near-Field.” Scientific Reports 5 (November): 16192. doi:10.1038/srep16192.