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Enhanced dielectric deposition on single-layer MoS 2 with low damage using remote N 2 plasma treatment.
- Source :
-
Nanotechnology [Nanotechnology] 2017 Apr 28; Vol. 28 (17), pp. 175202. Date of Electronic Publication: 2017 Apr 03. - Publication Year :
- 2017
-
Abstract
- Using remote N <subscript>2</subscript> plasma treatment to promote dielectric deposition on the dangling-bond free MoS <subscript>2</subscript> is explored for the first time. The N <subscript>2</subscript> plasma induced damages are systematically studied by the defect-sensitive acoustic-phonon Raman of single-layer MoS <subscript>2</subscript> , with samples undergoing O <subscript>2</subscript> plasma treatment as a comparison. O <subscript>2</subscript> plasma treatment causes defects in MoS <subscript>2</subscript> mainly by oxidizing MoS <subscript>2</subscript> along the already defective sites (most likely the flake edges), which results in the layer oxidation of MoS <subscript>2</subscript> . In contrast, N <subscript>2</subscript> plasma causes defects in MoS <subscript>2</subscript> mainly by straining and mechanically distorting the MoS <subscript>2</subscript> layers first. Owing to the relatively strong MoS <subscript>2</subscript> -substrate interaction and chemical inertness of MoS <subscript>2</subscript> in N <subscript>2</subscript> plasma, single-layer MoS <subscript>2</subscript> shows great stability in N <subscript>2</subscript> plasma and only stable point defects are introduced after long-duration N <subscript>2</subscript> plasma exposure. Considering the enormous vulnerability of single-layer MoS <subscript>2</subscript> in O <subscript>2</subscript> plasma and the excellent stability of single-layer MoS <subscript>2</subscript> in N <subscript>2</subscript> plasma, the remote N <subscript>2</subscript> plasma treatment shows great advantage as surface functionalization to promote dielectric deposition on single-layer MoS <subscript>2</subscript> .
Details
- Language :
- English
- ISSN :
- 1361-6528
- Volume :
- 28
- Issue :
- 17
- Database :
- MEDLINE
- Journal :
- Nanotechnology
- Publication Type :
- Academic Journal
- Accession number :
- 28367829
- Full Text :
- https://doi.org/10.1088/1361-6528/aa6756