Γ-profilometry: a new paradigm for precise optical metrology.

MLA

Falldorf, Claas, et al. “Γ-Profilometry: A New Paradigm for Precise Optical Metrology.” Optics Express, vol. 29, no. 22, Oct. 2021, pp. 36100–10. EBSCOhost, https://doi.org/10.1364/OE.434510.

APA

Falldorf, C., Agour, M., Müller, A. F., & Bergmann, R. B. (2021). Γ-profilometry: a new paradigm for precise optical metrology. Optics Express, 29(22), 36100–36110. https://doi.org/10.1364/OE.434510

Chicago

Falldorf, Claas, Mostafa Agour, André F Müller, and Ralf B Bergmann. 2021. “Γ-Profilometry: A New Paradigm for Precise Optical Metrology.” Optics Express 29 (22): 36100–110. doi:10.1364/OE.434510.