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Dynamic spectroscopic imaging ellipsometry.
- Source :
-
Optics letters [Opt Lett] 2022 Mar 01; Vol. 47 (5), pp. 1129-1132. - Publication Year :
- 2022
-
Abstract
- A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm <superscript>2</superscript> in an hour.
- Subjects :
- Spectrum Analysis methods
Refractometry methods
Subjects
Details
- Language :
- English
- ISSN :
- 1539-4794
- Volume :
- 47
- Issue :
- 5
- Database :
- MEDLINE
- Journal :
- Optics letters
- Publication Type :
- Academic Journal
- Accession number :
- 35230308
- Full Text :
- https://doi.org/10.1364/OL.451064