Investigation of correlative parameters to evaluate EUV lithographic performance of PMMA.

MLA

Kim, Kanghyun, et al. “Investigation of Correlative Parameters to Evaluate EUV Lithographic Performance of PMMA.” RSC Advances, vol. 12, no. 5, Jan. 2022, pp. 2589–94. EBSCOhost, https://doi.org/10.1039/d1ra07291a.

APA

Kim, K., Lee, J.-W., Park, B.-G., Oh, H.-T., Ku, Y., Lee, J.-K., Lim, G., & Lee, S. (2022). Investigation of correlative parameters to evaluate EUV lithographic performance of PMMA. RSC Advances, 12(5), 2589–2594. https://doi.org/10.1039/d1ra07291a

Chicago

Kim, Kanghyun, Jong-Won Lee, Byeong-Gyu Park, Hyun-Taek Oh, Yejin Ku, Jin-Kyun Lee, Geunbae Lim, and Sangsul Lee. 2022. “Investigation of Correlative Parameters to Evaluate EUV Lithographic Performance of PMMA.” RSC Advances 12 (5): 2589–94. doi:10.1039/d1ra07291a.