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Ultra-Large Compressive Plasticity of E-Ga 2 O 3 Thin Films at the Submicron Scale.
- Source :
-
Small methods [Small Methods] 2024 Aug; Vol. 8 (8), pp. e2301288. Date of Electronic Publication: 2023 Dec 06. - Publication Year :
- 2024
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Abstract
- Gallium oxide (Ga <subscript>2</subscript> O <subscript>3</subscript> ) usually fractures in the brittle form, and achieving large plastic deformability to avoid catastrophic failure is in high demand. Here, ε-Ga <subscript>2</subscript> O <subscript>3</subscript> thin films with columnar crystals and partial unoccupied Ga sites are synthesized, and it is demonstrated that the ε-Ga <subscript>2</subscript> O <subscript>3</subscript> at the submicron scale can be compressed to an ultra-large plastic strain of 48.5% without cracking. The compressive behavior and related mechanisms are investigated by in situ transmission electron microscope nanomechanical testing combined with atomic-resolution characterizations. The serrated plastic flow and large strain burst are two major deformation forms of ε-Ga <subscript>2</subscript> O <subscript>3</subscript> during compression, which are attributed to the dislocation nucleation and avalanches, formation of new grains, and amorphization. The ultra-large compressive plasticity of ε-Ga <subscript>2</subscript> O <subscript>3</subscript> thin films at the submicron scale can inspire new applications of Ga <subscript>2</subscript> O <subscript>3</subscript> in micro- or nano- electronic and optoelectronic devices, especially those that require impact resistance during processing or service.<br /> (© 2023 Wiley‐VCH GmbH.)
Details
- Language :
- English
- ISSN :
- 2366-9608
- Volume :
- 8
- Issue :
- 8
- Database :
- MEDLINE
- Journal :
- Small methods
- Publication Type :
- Academic Journal
- Accession number :
- 38054606
- Full Text :
- https://doi.org/10.1002/smtd.202301288