Formation of Black Silicon in a Process of Plasma Etching with Passivation in a SF 6 /O 2 Gas Mixture.

MLA

Miakonkikh, Andrey, and Vitaly Kuzmenko. “Formation of Black Silicon in a Process of Plasma Etching with Passivation in a SF 6 /O 2 Gas Mixture.” Nanomaterials (Basel, Switzerland), vol. 14, no. 11, May 2024. EBSCOhost, https://doi.org/10.3390/nano14110945.

APA

Miakonkikh, A., & Kuzmenko, V. (2024). Formation of Black Silicon in a Process of Plasma Etching with Passivation in a SF 6 /O 2 Gas Mixture. Nanomaterials (Basel, Switzerland), 14(11). https://doi.org/10.3390/nano14110945

Chicago

Miakonkikh, Andrey, and Vitaly Kuzmenko. 2024. “Formation of Black Silicon in a Process of Plasma Etching with Passivation in a SF 6 /O 2 Gas Mixture.” Nanomaterials (Basel, Switzerland) 14 (11). doi:10.3390/nano14110945.