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Holographic microscopy and integrated circuit inspection.

Authors :
van Ligten RF
Lawton KC
Source :
Annals of the New York Academy of Sciences [Ann N Y Acad Sci] 1969 Feb 10; Vol. 168 (3), pp. 510-35.
Publication Year :
1969

Details

Language :
English
ISSN :
0077-8923
Volume :
168
Issue :
3
Database :
MEDLINE
Journal :
Annals of the New York Academy of Sciences
Publication Type :
Academic Journal
Accession number :
4920041
Full Text :
https://doi.org/10.1111/j.1749-6632.1969.tb43138.x