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Holographic microscopy and integrated circuit inspection.
- Source :
-
Annals of the New York Academy of Sciences [Ann N Y Acad Sci] 1969 Feb 10; Vol. 168 (3), pp. 510-35. - Publication Year :
- 1969
Details
- Language :
- English
- ISSN :
- 0077-8923
- Volume :
- 168
- Issue :
- 3
- Database :
- MEDLINE
- Journal :
- Annals of the New York Academy of Sciences
- Publication Type :
- Academic Journal
- Accession number :
- 4920041
- Full Text :
- https://doi.org/10.1111/j.1749-6632.1969.tb43138.x