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Electrical calibration of spring-mass MEMS capacitive accelerometers.
- Source :
- Proceedings of the Conference: Design, Automation & Test in Europe; 3/18/2013, p571-574, 4p
- Publication Year :
- 2013
Details
- Language :
- English
- Database :
- Complementary Index
- Journal :
- Proceedings of the Conference: Design, Automation & Test in Europe
- Publication Type :
- Conference
- Accession number :
- 101096966