A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum.

MLA

Seungdo An, et al. “A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum.” Journal of Microelectromechanical Systems, vol. 23, no. 2, Apr. 2014, pp. 406–16. EBSCOhost, https://doi.org/10.1109/JMEMS.2013.2281316.

APA

Seungdo An, Gupta, N. K., & Gianchandani, Y. B. (2014). A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum. Journal of Microelectromechanical Systems, 23(2), 406–416. https://doi.org/10.1109/JMEMS.2013.2281316

Chicago

Seungdo An, Naveen K. Gupta, and Yogesh B. Gianchandani. 2014. “A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum.” Journal of Microelectromechanical Systems 23 (2): 406–16. doi:10.1109/JMEMS.2013.2281316.