Back to Search
Start Over
Displacement Sensing With Silicon Flexures in MEMS Nanopositioners.
- Source :
- Journal of Microelectromechanical Systems; Jun2014, Vol. 23 Issue 3, p502-504, 3p
- Publication Year :
- 2014
-
Abstract
- We report a novel piezoresistive microelectromechanical system (MEMS) differential displacement sensing technique with a minimal footprint realized through a standard MEMS fabrication process, whereby no additional doping is required to build the piezoresistors. The design is based on configuring a pair of suspension beams attached to a movable stage so that they experience opposite axial forces when the stage moves. The resulting difference between the beam resistances is transduced into a sensor output voltage using a halfbridge readout circuit and differential amplifier. Compared with a single piezoresistive flexure sensor, the design approximately achieves 2, 22, and 200 times improvement in sensitivity, linearity, and resolution, respectively, with 1.5-nm resolution over a large travel range exceeding 12 μm. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 23
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 101290596
- Full Text :
- https://doi.org/10.1109/JMEMS.2014.2316325