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A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode.

Authors :
Chunhua He
Qinwen Huang
Yunfei En
Zhao, Qiancheng
Zhenchuan Yang
Guizhen Yan
Source :
2014 IEEE International Conference on Electron Devices & Solid-State Circuits; 2014, p1-2, 2p
Publication Year :
2014

Details

Language :
English
ISBNs :
9781479923342
Database :
Complementary Index
Journal :
2014 IEEE International Conference on Electron Devices & Solid-State Circuits
Publication Type :
Conference
Accession number :
102525388
Full Text :
https://doi.org/10.1109/EDSSC.2014.7061183