Thermodynamics and Kinetics of Liquid Removal from Nano-Features during Single-Wafer Spin Cleaning.

Details

Language :

English

ISSN :

21628769

Volume :

3

Issue :

1

Database :

Complementary Index

Journal :

ECS Journal of Solid State Science & Technology

Publication Type :

Academic Journal

Accession number :

102649404

Full Text :

https://doi.org/10.1149/2.018401jss