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The impact of the gate dielectric quality in developing Au-free D-mode and E-mode recessed gate AlGaN/GaN transistors on a 200mm Si substrate.

Authors :
Wu, Tian-Li
Marcon, Denis
De Jaeger, Brice
Van Hove, Marleen
Bakeroot, Benoit
Lin, Dennis
Stoffels, Steve
Kang, Xuanwu
Roelofs, Robin
Groeseneken, Guido
Decoutere, Stefaan
Source :
2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD); 2015, p225-228, 4p
Publication Year :
2015

Details

Language :
English
ISBNs :
9781479962594
Database :
Complementary Index
Journal :
2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD)
Publication Type :
Conference
Accession number :
108573654
Full Text :
https://doi.org/10.1109/ISPSD.2015.7123430