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The impact of the gate dielectric quality in developing Au-free D-mode and E-mode recessed gate AlGaN/GaN transistors on a 200mm Si substrate.
- Source :
- 2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD); 2015, p225-228, 4p
- Publication Year :
- 2015
Details
- Language :
- English
- ISBNs :
- 9781479962594
- Database :
- Complementary Index
- Journal :
- 2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD)
- Publication Type :
- Conference
- Accession number :
- 108573654
- Full Text :
- https://doi.org/10.1109/ISPSD.2015.7123430