Diagnosis driven approach for low yield analysis and identifying root causes for final compensation from wafer foundry.

Details

Language :

English

ISBNs :

9781479972418

Database :

Complementary Index

Journal :

2015 China Semiconductor Technology International Conference

Publication Type :

Conference

Accession number :

108855599

Full Text :

https://doi.org/10.1109/CSTIC.2015.7153468