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Microscopic oxide defects causing BTI, RTN, and SILC on high-k FinFETs.

Authors :
Rzepa, G.
Waltl, M.
Goes, W.
Kaczer, B.
Grasser, T.
Source :
2015 12th IEEE International Conference on Advanced Video & Signal Based Surveillance (AVSS); 2015, p144-147, 4p
Publication Year :
2015

Details

Language :
English
ISBNs :
9781467376327
Database :
Complementary Index
Journal :
2015 12th IEEE International Conference on Advanced Video & Signal Based Surveillance (AVSS)
Publication Type :
Conference
Accession number :
111122248
Full Text :
https://doi.org/10.1109/SISPAD.2015.7292279