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Electrical properties of 30 nm width bi-layer interconnects of multi layer graphene and Ni.

Authors :
Ishikura, Taishi
Isobayashi, Atsunobu
Nishide, Daisuke
Ito, Ban
Saito, Tatsuro
Matsumoto, Takashi
Yamazaki, Yuichi
Miyazaki, Hisao
Watanabe, Masahito
Sakuma, Naoshi
Kajita, Akihiro
Sakai, Tadashi
Source :
2015 IEEE International Interconnect Technology Conference & 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM); 2015, p321-324, 4p
Publication Year :
2015

Details

Language :
English
ISBNs :
9781467373562
Database :
Complementary Index
Journal :
2015 IEEE International Interconnect Technology Conference & 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)
Publication Type :
Conference
Accession number :
111588207
Full Text :
https://doi.org/10.1109/IITC-MAM.2015.7325591