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Ultra-Compact 100 x 100 μm² Footprint Hybrid Device with Spin-Valve Nanosensors.
- Source :
- Sensors (14248220); Dec2015, Vol. 15 Issue 12, p30311-30318, 8p
- Publication Year :
- 2015
-
Abstract
- Magnetic field mapping with micrometric spatial resolution and high sensitivity is a challenging application, and the technological solutions are usually based on large area devices integrating discrete magnetic flux guide elements. In this work we demonstrate a high performance hybrid device with improved field sensitivity levels and small footprint, consisting of a ultra-compact 2D design where nanometric spin valve sensors are inserted within the gap of thin-film magnetic flux concentrators. Pole-sensor distances down to 400 nm are demonstrated using nanofabrication techniques combined with an optimized liftoff process. These 100 x 100 μm² pixel sensors can be integrated in modular devices for surface mapping without moving parts. [ABSTRACT FROM AUTHOR]
- Subjects :
- NANOSENSORS
SPIN valves
HYBRID systems
MAGNETIC flux
NANOFABRICATION
Subjects
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 15
- Issue :
- 12
- Database :
- Complementary Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 111985375
- Full Text :
- https://doi.org/10.3390/s151229809