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Recent Progress of Hard X-ray Imaging Microscopy and Microtomography at BL37XU of SPring-8.

Authors :
Yoshio Suzuki
Akihisa Takeuchi
Yasuko Terada
Kentaro Uesugi
Ryuta Mizutani
Source :
AIP Conference Proceedings; 2015, p1-4, 4p, 3 Black and White Photographs, 1 Diagram
Publication Year :
2015

Abstract

A hard x-ray imaging microscopy and microtomography system is now being developed at the beamline 37XU of SPring-8. In the latest improvement, a spatial resolution of about 50 nm is achieved in two-dimensional imaging at 6 keV x-ray energy using a Fresnel zone plate objective with an outermost zone width of 35 nm. In the tomographic measurement, a spatial resolution of about 100 nm is achieved at 8 keV using an x-ray guide tube condenser optic and a Fresnel zone plate objective with an outermost zone width of 50 nm. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
0094243X
Database :
Complementary Index
Journal :
AIP Conference Proceedings
Publication Type :
Conference
Accession number :
112689461
Full Text :
https://doi.org/10.1063/1.4937507