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An Electrochemical Microbubble-Based MEMS Pressure Sensor.
- Source :
- Journal of Microelectromechanical Systems; Feb2016, Vol. 25 Issue 1, p144-152, 9p
- Publication Year :
- 2016
-
Abstract
- A novel pressure transducer concept is introduced in which external pressure variations induce changes in the volume of a trapped microbubble ( \mu \textB ) in an electrolyte solution. These volumetric changes are monitored by electrochemical impedance-based measurements and may be used for pressure tracking applications. Microbubbles are nucleated on-demand by electrolysis within a confinement chamber with high precision (measured size RSD $\sim 1$ %). This pressure transducer concept was developed specifically for operation in liquid environments and features biocompatible construction, small footprint (<0.1 mm2), and low power consumption (<1 nW). This combination of features is ideal for in vivo pressure monitoring applications. [2015-0203] [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 25
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 112830610
- Full Text :
- https://doi.org/10.1109/JMEMS.2015.2499167