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Micromachined silicon hemispherical resonators with self-aligned spherical capacitive electrodes.
- Source :
- 2015 IEEE SENSORS; 2015, p1-4, 4p
- Publication Year :
- 2015
Details
- Language :
- English
- ISBNs :
- 9781479982035
- Database :
- Complementary Index
- Journal :
- 2015 IEEE SENSORS
- Publication Type :
- Conference
- Accession number :
- 112881439
- Full Text :
- https://doi.org/10.1109/ICSENS.2015.7370238