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Enhancement of contact line mobility by means of infrared laser illumination. I. Experiments.
- Source :
- Journal of Applied Physics; 2016, Vol. 119 Issue 8, p084904-1-084904-9, 9p, 3 Diagrams, 9 Graphs
- Publication Year :
- 2016
-
Abstract
- The shape of a droplet moving on a solid substrate is largely determined by the mobility of its contact line. Above a certain critical velocity, the droplet typically disintegrates and leaves residual liquid behind. We studied experimentally how localized infrared laser illumination can stabilize it against the progressive loss of liquid. We systematically varied the substrate velocity, the laser power, and the laser spot position and found that the critical velocity of the droplet can be substantially increased. These results are potentially important for increasing throughput in immersion lithography systems. [ABSTRACT FROM AUTHOR]
- Subjects :
- INFRARED lasers
VELOCITY
SUBSTRATES (Materials science)
LITHOGRAPHY
LIGHTING
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 119
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 113466793
- Full Text :
- https://doi.org/10.1063/1.4941389