A novel shock protection method based on MEMS compliant latching stopper.

Authors :: Xu, Kaisi
Zhu, Ningli
Zhang, Xianfeng
Su, Weiguo
Zhang, Wei
Hao, Yilong
Source :: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS); 1/1/2016, p1125-1128, 4p
Publication Year :: 2016

Language :: English
ISBNs :: 9781509019731
Database :: Complementary Index
Journal :: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Publication Type :: Conference
Accession number :: 114300168
Full Text :: https://doi.org/10.1109/MEMSYS.2016.7421833