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A low power MEMS-ASIC silicon resonant accelerometor with sub-?g bias instability and ?30g full-scale.

Authors :
Zhao, Jian
Xia, Guoming
Zhao, Yang
Qiu, Anping
Su, Yan
Source :
2016 IEEE International Symposium on Inertial Sensors & Systems; 2016, p46-49, 4p
Publication Year :
2016

Details

Language :
English
ISBNs :
9781467369398
Database :
Complementary Index
Journal :
2016 IEEE International Symposium on Inertial Sensors & Systems
Publication Type :
Report
Accession number :
115634977
Full Text :
https://doi.org/10.1109/ISISS.2016.7435541