Back to Search
Start Over
Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields.
- Source :
- Micromachines; 2016, Vol. 7 Issue 5, p88, 20p
- Publication Year :
- 2016
-
Abstract
- In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybrid architecture, lower detectivities are expected when compared with those obtained for individual sensors. This particularity results from the change of sensor's operating point to frequencies above the 1/f noise knee. [ABSTRACT FROM AUTHOR]
- Subjects :
- MAGNETORESISTIVE devices
MICROELECTROMECHANICAL systems
DETECTORS
MACHINE design
Subjects
Details
- Language :
- English
- ISSN :
- 2072666X
- Volume :
- 7
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Micromachines
- Publication Type :
- Academic Journal
- Accession number :
- 115778867
- Full Text :
- https://doi.org/10.3390/mi7050088